WebMar 12, 2024 · ABSTRACT. This article reviews the state-of-the art status of thermal atomic layer etching of various materials such as metals, metal oxides, metal nitrides, semiconductors, and their oxides. We outline basic thermodynamic principles and reaction kinetics as they apply to these reactions and draw parallels to thermal etching. WebApr 28, 2024 · Thermal etching is an isotropic etching process because reactants and reaction products move with thermal energies and in random direction. Aspect ratio dependent etching can be effectively reduced by increasing pressure. Archetypical applications of thermal etching are etching of silicon with fluorine and etching of SiO 2 …
Thorsten Lill - Google Scholar
WebThorsten B. Lill. Plasma etching or Reactive Ion Etching (RIE) is the workhorse for patterning of semiconductor devices since the early 1980-ies when it replaced wet etching in … WebJun 28, 2024 · Thorsten Lill, PhD, is Vice President of Emerging Etch Technologies and Systems at Lam Research. He received his doctorate in Physics from the Albert Ludwigs University in Freiburg, Germany and researched as a … milk ducts in early pregnancy
Thorsten Lill IEEE Xplore Author Details
WebJul 1, 2015 · AVS Atomic Layer Etching Workshop 2015 July 1-2, 2015, Portland, Oregon. Content uploaded by Thorsten B. Lill. WebThorsten Lill, PhD, is Vice President of Emerging Etch Technologies and Systems at Lam Research. He received his doctorate in Physics from the Albert Ludwigs University in Freiburg, Germany and researched as a post doc at the Argonne National Laboratory. WebDec 10, 2024 · Atomic Layer Processing by Thorsten Lill, 2024, Wiley & Sons, Limited, John edition, in English. It looks like you're offline. Donate ♥. Čeština (cs) Deutsch (de) English (en) ... milk dye and soap experiment explanation